Modeling and Experimental Investigations of Nanostructured Ag Thin Films Produced by Oblique-Angle Deposition and Its SERS Performance

The growth mechanism of nanocolumnar silver thin film deposited on a smooth silicon substrate using electron beam evaporation process at an oblique angle was simulated with the Kinetic Monte Carlo method. Following nanostructured film, further computational simulation done COMSOL for surface-enhanced Raman scattering effects. results were compared against corresponding experimental results, which demonstrated high agreement between and data. It found that as incident deposition increased, density Ag significantly decreased surface roughness increased. When 75° 85°, resulting structure tilted. For films all investigated angles, effects observed. Particularly, nanocolumns 85° showed remarkable Surface-enhanced Scattering This seen in both simulations results: Enhancement factors 2 × 107 3.3 105 experiment.